Application results show clearly that this method is feasible and that the principle of leakdetection by ultrasonic technique is effective to vacuum systems.
实践表明，该方法是可行的。所给出的应用超声波技术检测真空系统泄漏的原理和检测方法是有效的。
2
It is Introduced the principle and method of vacuumleak age detection of the special equipment in the semiconductor production and the experience on solving practice problems with the method.
本文介绍了半导体制造专用设备的真空检漏的原理、方法，以及用该方法解决实际问题的一些实践经验。
3
The paper also introduces the composing and characteristics of oil free vacuum environmental simulator, the parameters' analysis of leakdetection, and so on.