The stochastic nature of the IC fabrication process and the resulting difficulties in the process control are described.
本文说明了IC生产工艺的随机性及其给工艺控制和决策带来的困难。
2
A verification theorem for general stochastic optimal control with the state following a jump_diffusion process is showed.
证明了一个状态为跳跃扩散过程的一般最优控制问题的验证性定理。
3
The regression analysis method of non stochasticprocess and movable control over the target area was used to assess seeding effect. The target area was determinated by diffusion equation.