Through testing and analysing on the optoelectronic properties of them, effects of sputteringtemperature on TiOx thin films were discussed.
通过对其光电性能的分析测试，探讨了溅射温度对氧化钛薄膜性能的影响。
2
The third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the PCR reaction.