LIGA mask technology based on siliconprocess technique and double side alignment is presented. The processing technology is simple.
提出一种基于硅工艺和双面对准技术的LIGA掩模技术，工艺十分简单。
2
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
3
This advanced processtechnology achieves the lowest possible on-resistance per silicon area, resulting in outstanding performance.