A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using siliconbulk micromachining technology.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
2
This paper investigates one kind of micro heat pipe arrays (MHPA), which are fabricated by advanced siliconbulk micromachining and anodic bonding technology.
介绍了一种基于硅体加工技术以及阳极键合技术的微热管阵列。
3
The silicon bonding technology is generally combined with surface silicon machining and bulksilicon machining in MEMS.