With the increase of the implantation voltage, the root-mean-square roughness (RMS) of Zr films almost don't change.
随着注入高压的增加,薄膜的表面粗糙度均方根(RMS)值的变化不大。
2
The results show that, the natural frequency, dynamic amplification factor and acceleration root of meansquare of seat suspension will decrease with the increase of proportional valve input voltage.