In this dissertation. The theory and key technologies to measure long-range displacement with nanometer resolution by metrologygrating is studied.
本文主要研究利用低线数计量光栅实现具有大量程、纳米级分辨率的位移测量理论及其关键技术。
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This paper presents a new non-contact displacement sensor with diffraction gratingmetrology system based on an improved Foucault focus detection method.