Laser-induced plasma can be classified as metalplasma and shielding gas plasma.
激光诱发的等离子体可分为金属蒸汽等离子体和保护气体等离子体。
2
A high dense metalplasma can be produced by using cathodic vacuum arc discharge technique.
利用阴极真空弧放电技术能够产生高密度的金属等离子体。
3
The plasma can be 4 generated by hot-cathode discharge or RF discharge of gas. In addition, the device has four metalplasma sources, two magnetron sputtering targets, cold and hot target supports.