The mold manufacturing is the key part in imprint lithography process, which includes electron beam direct writing, stepping molding, and the conversion from small mold to big mold.
采用电子束直写、步进制模、压印翻制的压印模具生产工艺,其模具的制造是目前面临的难点。
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We also demonstrated the possibility of molding the flow of em beam in the magnetic photonic crystal with a nonuniform ESMF to create a mirage effect.