The micro-electromechanicalsystem (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
2
The connection part is connected with the stress dispersion structure and a basal plate of the micro-electromechanicalsystem device.
以及一连接部，连接该应力分散结构及该微机电系统装置的一基板。
3
The LCR-100 Gyrocompass AHRS is a north finding attitude and heading reference system based on a state-of-the-art fibre-optic gyro and micro-electromechanical (MEMS) accelerometers.