The glassy transition temperature of ionimplantedlayer decreases along with the increase of dose, the decrease of the glassy transition temperature is independent of implantedion type.
注入层的玻璃化转变温度随注入剂量的增加而降低，玻璃化温度降低和注入离子的种类无关。
2
Temperature rise of implanted samples have direct influences on properties of ion implantation layer.
注入样品的温升对离子注入层的性能有直接影响。
3
A new plasma immersion ion implantation (PIII) technique was employed for implanting nitrogen ions in steel 45. The composition, microstructure and property of the implantedlayer were analyzed.