A microscopic moire interferometry method with ultra high sensitivity was developed for in plane displacement measuring.
本文提出了一种具有超高灵敏度的显微液下云纹干涉法。
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This system employed optical flow technology and microscopicinterferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
A stroboscopic microscopicinterferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.