The concrete structure of the interferometric detection system with the low-coherence source was presented, and the detection principle of the interferometric detection system was narrated.
针对大口径望远镜拼接式主镜，提出一种基于迈克耳孙干涉原理的低相干光源干涉检测系统。
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This is the surface geometry for measurement of laser interferometric Profiler part of the software source code.