Self-aligned gate

A cleanroom facility where these steps are performed

In electronics, a self-aligned gate is a transistor manufacturing feature whereby a refractory gate electrode region of a MOSFET transistor is used as a mask for the doping of the source and drain regions. This technique ensures that the gate will slightly overlap the edges of the source and drain.

单词	Silicon gate
释义	Silicon gate 英语百科 Self-aligned gate In electronics, a self-aligned gate is a transistor manufacturing feature whereby a refractory gate electrode region of a MOSFET transistor is used as a mask for the doping of the source and drain regions. This technique ensures that the gate will slightly overlap the edges of the source and drain.
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Silicon gate

Self-aligned gate