Selective area epitaxy

Selective area epitaxy is the local growth of epitaxial layer through a patterned dielectric mask (typically SiO₂ or ) deposited on a semiconductor substrate. Semiconductor growth conditions are selected to ensure epitaxial growth on the exposed substrate, but not on the dielectric mask.

单词	Selective area epitaxy
释义	Selective area epitaxy 英语百科 Selective area epitaxy Selective area epitaxy is the local growth of epitaxial layer through a patterned dielectric mask (typically SiO₂ or ) deposited on a semiconductor substrate. Semiconductor growth conditions are selected to ensure epitaxial growth on the exposed substrate, but not on the dielectric mask.
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