微技术包含了微机电传感和控制、驱动组件制程开发技术、微机电系统集成技术、射频(RF MEMS)、光学（Optical MEMS）、生物医学（Bio MEMS）、电脑与周边（Computer Perip-heral MEMS）微机电系统研究。

Microtechnology is technology with features near one micrometre (one millionth of a metre, or 10 metre, or 1μm).

In the 1960s, scientists learned that by arraying large numbers of microscopic transistors on a single chip, microelectronic circuits could be built that dramatically improved performance, functionality, and reliability, all while reducing cost and increasing volume. This development led to the Information Revolution.