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单词 Ion beam etching
释义

Ion beam etching

英语百科

Ion beam

(重定向自Ion beam etching)

An ion beam is a type of charged particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. A variety of ion beam sources exist, some derived from the mercury vapor thrusters developed by NASA in the 1960s.

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