Electron microprobe

A Cambridge Scientific Instrument Company

For comparison purposes, a similar section of the 1886VE10 microcontroller die as seen by an optical microscope.

An electron microprobe (EMP), also known as an electron probe microanalyzer (EPMA) or electron micro probe analyzer (EMPA), is an analytical tool used to non-destructively determine the chemical composition of small volumes of solid materials. It works similarly to a scanning electron microscope: the sample is bombarded with an electron beam, emitting x-rays at wavelengths characteristic to the elements being analyzed. This enables the abundances of elements present within small sample volumes (typically 10-30 cubic micrometers or less) to be determined. The concentrations of elements from beryllium to plutonium can be measured at levels as low as 100 parts per million (ppm). Recent models of EPMAs can accurately measure elemental concentrations of approximately 10 ppm.

单词	Electron probe microanalysis
释义	Electron probe microanalysis 英语百科 Electron microprobe An electron microprobe (EMP), also known as an electron probe microanalyzer (EPMA) or electron micro probe analyzer (EMPA), is an analytical tool used to non-destructively determine the chemical composition of small volumes of solid materials. It works similarly to a scanning electron microscope: the sample is bombarded with an electron beam, emitting x-rays at wavelengths characteristic to the elements being analyzed. This enables the abundances of elements present within small sample volumes (typically 10-30 cubic micrometers or less) to be determined. The concentrations of elements from beryllium to plutonium can be measured at levels as low as 100 parts per million (ppm). Recent models of EPMAs can accurately measure elemental concentrations of approximately 10 ppm.
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Electron probe microanalysis

Electron microprobe