The method could also be used for other microcircuit processes.

所讨论的方法可用于其他微电路工艺设备的表徵.

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Integrated circuit ( IC ): or microcircuit , or chip, or microchip.

集成电路: 亦称微电路 、 芯片或微芯.

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The modeling of microcircuit process equipment is investigated using fractional factorial experimental design and data transformation.

利用部分要因试验设计与数据转换表征微电路工艺设备).

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