A new type control circuit of ion source was designed.
阐述了一种离子源的新型控制电路.
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Plasma characteristics of a plus ed vacuum discharge deuterium ion source were investigated by emission spectroscopy.
用发射光谱法研究了真空放电氖离子源的等离子体性质.
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An intense ECR ion source for ADS ( accelerator driven sub - critical system ) is described.
介绍了正在研制的一台强流ECR离子源.
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The theory of ion etching and the parameter of ion source designing are discussed in detail.
并且详细论述离子刻蚀的原理以及离子源的参数设计.
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KEYWORDS: GIMS, ion source, anode layer, sputtering, TiN, ion plating, medium frequency, pulsed DC.
中文关键词: 气离溅射 、 离子源 、 阳极层流 、 溅射 、 氮化钛 、 离子镀膜 、 中频 、 脉冲直流.
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Spectrum diagnosis as an experimental method, is convenient and irreplaceable in ion source investigation.
本文列举了光谱诊断方法在离子源研究中的几种典型应用.
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In order to improve the charge distribution for MEVVA ion source, a radial field was introduced.
为解决麦瓦(MEVVA)离子源束流的径向分布均匀性问题,采取了加入会切磁场的方法.
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In this paper , Development of liquid metal ion source for nanometer focused beam system is introduced.
叙述了为纳米聚焦离子束装置研制的镓液态金属离子源的制备.
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