Ultrafine TiN particles with volume diameter of 123～284 nm are synthesized via microwave CVD process.

在此基础上采用微波等离子体化学气相沉积法,合成了粒径为123～284nm的TiN超细颗粒.

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ZnO nanowires and nanorods were synthesized via a CVD process in a horizontal tube furnace.

本研究系以管状高温炉利用化学气相沉积制程来合成氧化锌奈米线及奈米柱.

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