rpecvd

网络释义

1.	remote plasma-enhanced chemical vapor deposition ...oxide (～0.6 nm) and (ii) remote plasma-enhanced chemical vapor deposition (RPECVD) to deposit the oxide film. zl50.com
2.	远距电浆增强化学气相沉积 --远距电浆增强化学气相沉积（RPECVD）是和PECVD技术很相近的技术。但晶圆不直接放在电浆放电的区域，反而放在距离 … www.israelidiamond.co.il