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Micro electromechanical systems (MEMS) technology has matured to the point where practical industrial applications are possible.

Around the goal of a MEMS photo-acoustic cell, this paper developed a highly sensitive miniaturized infrared photo-acoustic system.

MEMS connector, which is a connector made by using MEMS technology, will be able to meet such a stringent requirement.

Thought to be the next big wave, MEMS-based optical switching devices fizzled when the telecommunications market imploded.

Sacrificial layer thickness is one of the significant parameters of MEMS surface process and its measurement and control is very important.

The MEMS technology can be used to minify camera circuit and transmitting circuit board. So the size of the capsule can be reduced largely.

But most energy harvesting methods are difficult to be applied to MEMS due to structure size and terms of usage.

Designed the big damping electrostatic comb-drive MEMS optical switch, and established the system simulation model of the optical switch.

To carry out the preliminary exploration of MEMS processing on this micro-electrostatic vibration generator.

Silicon microphones have the potential to be the next high-volume MEMS application.

In essence, it was a microscopic etalon in which the parallel reflecting surfaces were thin-film layers created using MEMS techniques.

Nowadays, RF MEMS accessory has found its great application due to its small size, light weight and low power consumption.

Texas Instruments dominates the optical MEMS market for digital displays with its digital light processing technology, or DLP.

The vacuum packaging result of MEMS devices show good effect of this equipment.

The system uses standard rotary table as standard rate provider, FOG as test criteria and MEMS gyro as the tested gyro.

Noninvasive location technology is the key one of MEMS-based medical device for diagnosis and treatment inside human body.

Researching microgripper suitable for manipulating microparts is one of the key links for realizing the industrialization of MEMS.

Bonding with the silicon surface often silicon processing and the combination of silicon processing, used in the processing of MEMS.

MEMS technology is an outgrowth of the highly sophisticated semiconductor industry.

Micro-electro Mechanical Systems (MEMS) are mechanisms that generally incorporate silicon based mechanical and electrical components.

MEMS; hot embossing; isothermal solidification; solid-liquid interdiffusion ; metallic micro-devices.

A system adapt to MEMS encapsulation was set up for the sake of gist of theory design and key parameter for manufacture.

Since light must get to the surface of packaged MEMS devices in optical measurement technology.

In this paper, RBFs methods are also used for analyzing MEMS force-field coupling problem.

At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.

"There's been a rule for MEMS, that is, one product and one process, " Topology analyst Amigo Liu said.

Micro Systems Engineering includes Micro Electro-Mechanical Systems (MEMS) and related equipment design, manufacture and package.

Micro-electro-mechanical system (MEMS) is a new area which spring up a research upsurge in the internationality in recent years.

Inspired by the concept of air-bearing, a new testing method based on MEMS technology is proposed in this thesis.

Topology optimization has been widely used in continuum structures, MEMS and heat radiation structures design.

A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.

Our goal is to design better satellite propellant management devices and address two-phase flow in microchannel and MEMS devices.

Previous investigations have shown that the fluid behavior around MEMS is different from the macroscopic counterparts.

And the performances of the designed micro deformable mirrors can meet the requirements for common Adaptive Optics applications.

MEMS markets have been and will always be driven by innovation. It means that, every year, new MEMS developments are coming out.

The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.

These mikes use a technology known as MEMS (microelectromechanical systems).

The design and fabrication of a RF MEMS voltage control capacitor(VCC) is described.

The system level simulation play an important role in MEMSCAD and the establishment for macro - model is the key of system level simulation.

A new technology is presented of ultrasonic and electrochemical machining for manufacturing micro-instruments.

Residual stresses produced by micro-machined process have key influence on the RF MEMS Switches' dynamic characteristics.

The SIP (system in a package)with lower parasitic effect and higher integration satisfy the RF-MEMS system.

Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system(MEMS) products.

The system meets the requirements of mobile satellite communication and the cost is lower by using MEMS gyro.

With the rapid development of MEMS, Nanofluids have become today's research focus for the predominant thermophysical properties.

During manufacturing and measuring MEMS devices, a very stable high-tech platform is required.

MEMS(Micro Electronic Mechanical System) accelerometers have wide applications in gauge check.

The fabrications and applications of micro probes integrated with other MEMS components are investigated in this study.

The hardware structure of a strap-down attitude system designed on the basis of MEMS inertial apparatus is introduced.

The macro modeling method for Micro-electro-mechanical System(MEMS) devices is a key issue in the design and simulation of MEMS system.

The invention can be applicable to various MEMS devices with deformable beams.

In 1994 the U. S. defense technology program report, the key technology projects listed MEMS.

This paper introduced the design, fabrication and performance of some novel MEMS (micro electro-mechanical system) optical switches.

The outlier signal from the MEMS gyro drift could be got rid of effectively by uniting the mean filter and the median filter.

Mechanical Engineers' Handbook, Instrumentation, Systems, Controls, and MEMS, 3rd Edition.

Finally, the structure of folded beams and equivalent emissivity were analyzed after designing initial structure of the MEMS shutters.

The output of MEMS accelerometer is influenced by the environment temperature.

The integrated MEMS capacitive accelerometer interface circuit will be studied here in this dissertation.

A uniaxial tensile test method for measuring mechanical properties of MEMS thin film materials is presented.

Crossed, double T and curvilineal CE chips embedded optical fiber were fabricated on the glass substrates by using MEMS technology.

Digital television displays are the most significant and growing arena for MEMS.

Two types of solid micro-thruster structure won designed based on MEMS technique, one of which with discrete and abnormal laval nozzle.

The fracturing process of the granitic sample was monitored in near-source using MEMS sensor and the suited technology.

These studied methods and conclusion provided foundation for MEMS CPW's microscale studding field.

MEMS colloid thruster array can meet the thruster index requirements of small size and high specific impulse.

In the research on MB microsystem based on MEMS technology, the design and fabrication of a MB chip is the key process.

This humidity sensor was fabricated with the standard CMOS technology and the MEMS post-processing step.

For the purpose of fabricating MEMS shutters, bulk silicon process was devised.

Structure material of MEMS was combined with nano-oxide particles by synchrotron radiation LIGA microcasting technics.

With the rapid development of micro electro mechanical system(MEMS), mechanical properties of MEMS are being focused.

MEMS devices with minimum volume and cost were realized by the embedded CMOS process.

Capacitive MEMS micro-accelerometer is widely used because of its high resolution, large dynamic range and low temperature drift.

The physical properties of cantilever, in particular the spring constant has important influence on the micro component of MEMS.

The dynamic measurement technique is very important for the design, manufacture and reliability of MEMS.

Sub-micron and nano beam is the fundamental structure of the device used in MEMS and NEMS.

As we shrink MEMS to NEMS, device physics becomes increasingly dominated by the surfaces.

This paper raises a scheme of a micro-manipulation end-effecter based on flexure hinge for the MEMS research and test.

Other major markets for MEMS displays are DLP front projectors and commercial cinema.

The microneedle is fabricated by MEMS technology with SU-8, and the permanent magnet array is fabricated by electroplating technology.

The MEMS micro-actuator has great market potential and future applications.

The sensor was fabricated on ceramic substrate, using two step MEMS lift-off processes.

A model of a new capsule drug delivery MEMS is proposed.

The connotation and the wide applications of MEMS , the new field, were illustrations.

The novel controlled drug delivery system has been researched widely in world on MEMS technology.

device monitored internal temperature and moisture while the nanotube detected cracks forming inside the concrete.

The frequency equation of RF MEMS switches was derived by separation of variable.

Obtaining the macro model of MEMS is the key of MEMS system-level modeling and simulation.

It is an effective way that reduced-order models of MEMS devices are established based on linear orthogonal mode shapes.

Based on MEMS technology, a novel capacitive SO2 gas sensor and its peripheral current reference circuit was proposed in this paper.

The application of MEMS in round bloom caster at Baotou Steel was introduced.

Two of the newest mobile phones, Google's Nexus One and Motorola's Droid, both use MEMS microphones in this way.

Stability: 6 DOF motion measurement and control, the use of high-performance MEMS sensor technology, impact resistance, low drift.

The design and fabrication of segmented micro deformable mirrors based on MEMS technology were researched.

This paper describes a design solution of automatic calibration platform based on MEMS accelerometer.

Obtaining National Natural Science MEMS Lab Foundation of China and National 863 Plan project in recent years.

This paper gives a design scheme of input device based on MEMS accelerometers: use accelerometers to detect the user's motion.

It is the ability to combine CMOS and MEMS (microelectromechanical systems) structures into one process flow.

A method using micro-volume thermal conductivity detector based on MEMS technology is presented in this paper.

The packaging technology of MEMS is a key technique for MEMS based on microelectronics packaging.

To MEMS, the important role is the manufacture and process of micro-parts.

The micro-generator based on MEMS technology becomes a research focus for its small volume and long lifetime.

This paper introduces an artificial retina microelectrode array, which is based on the technique of micro-electro mechanical system (MEMS).

Based on MEMS technology, gastrointestinal wireless endoscope signifies much during the development of electronic endoscope.

These science and technology include digital signal processor (DSP) , radio frequency (RF)IC and microelectronics machine system (MEMS) .

This paper based on the technology of RF MEMS and focused on RF MEMS switches and phase shifters.

Therefore, familiar with the properties, for example, mechanical properties of materials is essential to the designing of the MEMS devices.

The research of TiNiPd high temperature shape memory films is important for Micro-Electro-Mechanical Systems (MEMS) working at 100oC~200oC.

At the same time, the rapid development of MEMS makes ever-increasing demands of micro-power devices.

The principle of the optical fiber MEMS sensor, which is based on Fabry-Perot interference, is discussed.

The first commercial MEMS devices evolved from the mid-1960s, reaching high-volume production in the 1990s.

VTI's accelerometers are based on our proven and robust silicon capacitive 3D-MEMS technology.

Micro Electro-Mechanical System (MEMS) is a promising subject, and it is expected to have a huge market in the future.

So, the research on mechanical properties of materials will accelerate the development of MEMS.

A flexible tactile sensing array based on MEMS is proposed in the paper.

A kind of optical fiber MEMS pressure sensor based on phase demodulation is designed and fabricated.

With the expanding of precise mechanic, MEMS, and optical fields, more and more attentions are paid to micro-EDM.

In the chapter 5, Based on the MEMS technology, a method of fabrication of micro EHD pump is presented.

Theoretical Analysis and Experimental Study of a Planar Type MEMS Electromagnetic Actuator

Manufacturing Silicon MEMS as the Heart Beat of Electronic System

Negative-Resistance Oscillations Characteristics of a New Type Silicon Magnetic Sensitive Transistor on MEMS

Study of Measurement Methods on Thin- film Thermophysical Properties for MEMS Applications

Development of a RF MEMS Voltage Controlled Oscillator and its Phase Noise Characteristic

Design of a Micro-gripper for MEMS Assembly and Its Experimental Research

Nonlinear Dynamic Characteristics Analysis and Design of a MEMS Inertial Sensing Device

Modeling and Simulation of a Test Structure for Measuring Vertical Fracture Strength of MEMS Film

Study of Silicon-Based MEMS Technology and Its Standard Process

Design of New Controlled Drug Release Micro-carriers Based on MEMS and Study of Its Drug Release Traits

Experimental Study on the Design of a Capsule MEMS Picking Up Sample in Gastrointestinal Tract

Analysis and optimization of a side pull-down electrodes controlled MEMS varactor

Theoretical and Experimental Study on an Electrostatic MEMS Optical Switch

A Method for In-Situ Measuring Average Stress Gradient and Equivalent Elastic Modulus of a MEMS Film

Study of Microtribological and Wear Properties of Silicon Material Applied to MEMS

Electrophoresis Deposition of Carbon Nanotubes in MEMS Structures and Their Field Emission Characteristics

The requirement of the study of high precision orientation system used in MEMS manufacturing

Characteristic research of new type silicon magneto transistor manufactured by MEMS techniques

Study of vacuum packaging and vacuum level testing technologies of MEMS packaging

Electromagnetic MEMS Technology and Applications in Biomedical Engineering

Design and Simulation of a High-tuning-range MEMS Voltage Controlled Capacitor for RF Applications

Study of low temperature eutectic bonding process for MEMS hermetic package

Fabrication and Characterization of Tunneling Current of Anodic Bonded Dry-Etched MEMS Tunneling Accelerometer

Design and analysis of a MEMS horizontal torsion micro mirror with folded springs

Characteristics simulation of MEMS packaging using multichip modules technology

Extended Kalman Filter for IMU Attitude Estimation Using Magnetometer, MEMS Accelerometer and Gyroscope

IC Design and Test of a High Performance Operational Amplifier Applied in Certain MEMS Devices

Study on Measurement Methods and Key Technologies for Dynamic Characterization of MEMS Microstructures

Study on the In-Situ Measurement Method for Equivalent Stress Gradient of a MEMS Film

Study of microscale effect of MEMS coplanar waveguide cavity structure

Design of an Electrostatic Silicon Torsion Micromirror for Low Drive Voltage and Wide Angle MEMS Optical Switch Applications

Mechanical-electrical Coupling Analysis and Simulation for Electrostatic MEMS Device

MEMS Devices Fabricated by Microfabrication Technology: Research Status and Prospect

Modeling of MEMS reflecting mirror and its control experimental research

Study of a Decoupled Z-Axis MEMS Gyroscope

Study of MEMS RF Switches Array Membrane--Millimeter Wave Phase Shifter

Theoretical analysis and numerical simulation of the optical fiber MEMS pressure sensor

Low Cost MEMS Variable Optical Attenuator for Optical Telecommunication Application

Theory and Analysis of a MEMS Piezoresistive Pressure Sensor

System analysis and design of a MEMS tunneling accelerometer

Investigation of Selectively Forming Porous Silicon Used in MEMS

MEMS: A Small Technology with a Huge Impact on Consumer Electronics

Modeling and simulation of nonlinear behavior of mechanical-electrostatic coupled MEMS devices

Measurement and Analysis on Electromagnet Moving- MEMS Variable Optical Attenuator

Segmentation and Features Identification for MEMS Assembly Images under Microscope

Eutectic Die Bonding Technology and Its Applications in MEMS Packaging

Optimization of A New Type of MEMS Phase Shifter Using the Varying Population Size Hybrid Genetic Algorithm

Design and calibration for an inertial measurement unit using MEMS sensors

Study of Sacrificial Layer Etch and Release Technology in MEMS Device

Fabrication and Testing of the MEMS High Temperature Capacitive Pressure Micro-sensor

Math principles for piezoresistive MEMS gyroscopes interface circuits

MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating

A Teeterboard Pattern MEMS Permanent Magnet Bistable Structure Supported by Torsion and Cantilever Beam

Design and Analysis of a DC and AC Separated MEMS Switch for Ku Band Applications

Analysis of Electromagnetic Interference for Capacitive MEMS Shunt Switches

Metallic Film Deposited by Evaporation Method for MEMS Interconnection Technology

The Dynamic Characteristic Simulation Analysis of MEMS-based Inertial Delay Slider Mechanism

Study of Solenoid-type Microinductor with Magnetic Core Fabricated by MEMS Technique

Fabrication of Metal Interlinked Pillar by Using lift-off Technology and Its Application in MEMS

Research on the MEMS Inertial Servo-accelerometer with Large Measurement Range and Sandwich Structure

Design of the Sensing Element of MEMS Accelerometer used in the Fuze

Research on thermal characteristic and compensation algorithm for MEMS-gyroscope

MEMS Phase Shifter and Its Application in Mini-Communication Systems

Analysis of Influence of MEMS Electromagnetic Microactuator Wear on Performance of Optic-fiber Switch

Model and Analysis of Electromagnetic Wave Radiated During Switching from Capacitive RF MEMS Switches

Experimental association formula simulation and revision of fluid pressure in MEMS micro channel

Study on Electro-Thermal Analytical Model of MEMS Multilayer Cantilever Microactuator

Measurement and Dynamic Response Analysis on a MEMS Variable Optical Attenuator

Optical Communications Devices with MEMS Technology and Market Foreground

Theoretical Analysis and Simulation on a Low Voltage Actuated Microwave MEMS Switch

Design and Analysis of Velocity Hydrophone with Co-Oscillating Sphere and Inner MEMS Accelerometers

Application Study of Thermal Conductivity Detector Based on MEMS for the Gas Monitoring System of Transformer Oil

Study of Narrow Electron-Beam Liquid Lithography for MEMS

Fabrication and experiment of a MEMS based cold gas thruster

Study of Wavelet Transform to Reduced Order Modeling for MEMS

Application and Development Tendency of MEMS Technique in the Fields of Navigation, Guidance and Control

Compensation of the Thermal Aberrations in Laser Resonators Through MEMS-DMs

Thermomechanical Reliability Simulations of IC - MEMS Devices. pdf

Feedback control strategy suppressing structural error in MEMS gyroscope

Development of a Novel Bi-stable MEMS Electromagnetic Microrelay

Application of MEMS Optical Switch in Optical Interconnection Network for Cluster System

Design and Optimization of a RF MEMS Variable Capacitor

Study of Complex Substrate MEMS Microstrip

Research on reliability of the MEMS convective accelerometer

Study on the Performance of Phase-Shifter in the MEMS Microscopic Interferometric Measuring System

Study on Measurement of Surge Micro-Shape Using Three-Dimensional MEMS Mechanical Quantity Sensor

Dynamic Characterization of an Innovative RF MEMS Switch

MEMS Technology and Its Military Applications

Nanoindentation applying to mechanical measurement for MEMS

Optical Measuring Methods for Dynamic MEMS Characterization

Characteristic analysis and realization of microwave MEMS phase shifter

Microscale Thermal Science and its Applications in MEMS

A Method of Measuring Young's Modulus and Residual Stress in Typical MEMS Structures Using a Surface Profilometer

MEMS Accelerometer and its Applications

Technological Study of Fabrication of RF MEMS in Series

A novel composite membrane bridge structure for RF MEMS phase shifter and switched tunable capacitor

MEMS-based micro fuel cell and its air supplying method by piezoelectric fan

Development of a MEMS-Based RF Low-Phase-Noise Voltage Controlled Oscillator

Research on Vacuum Packaging Process, Equipment and Vacuum Degree Detection of MEMS Devices

Integration and Packaging of Sensors and MEMS Devices Through Low Temperature Wafer Bonding

Research on New MEMS Accelerometer and Applications in Mechanical Fault Diagnosis

Calculation and Simulation of MEMS Electret-Based Micro Vibration Power Generator

Application of fast wavelet transformation in signal processing of MEMS gyroscope

Micro Laser Doppler Vibrometer Technology for MEMS Dynamic Measurement

Applications of Supercapacitor in MEMS Vibration Generator

Emerging Automotive Applications for MEMS Inertial Sensors

Study on MEMS Packaging Technology and Its Standard Process

MEMS Technology and explosive growth fiber optical communication

Applications of Pulsed Laser Microfabrication Technology in MEMS

Design and Realization of a Low Loss X-Band RF MEMS Bandpass Filter

Design and Fabrication of a Novel MEMS Silicon Spring

Application of MEMS-based integrated navigation system in aerial-to-ground guidance weapon

Application of MEMS Technology to Fabrication of Uncooled Infrared Detector

Application of MEMS Accelerometer with Digital Output in Vehicle Navigation

Survey on MEMS technology and its application in biology domain

MEMS Technology and its Applications in Metrology

MEMS Technology and Its Application in Satellites

MEMS-Based Micro Inertial Sensor and Its Application on Vehicle

Research on principle and experiments of trace explosive particle detection with MEMS

Effect of dielectric layer surface roughness on the isolation of an RF MEMS switch

Development and Improvement of Drug Delivery Micro-structure in the Body Based on MEMS

Basic characteristic, key technology and application prospect of MEMS

Release Process of Sacrificial and Analysis of Residual Stress in the MEMS Variable Capacitor Manufacture

An Electro-Magnetically Driven MEMS Variable Optical Attenuator

Stroboscopic Synchronous Control System in MEMS Dynamic Testing

Design and Simulation of a RF MEMS Tunable Capacitor

Detection circuit design of MEMS capacitive accelerometer

Realization of Stroboscopic Driving Circuit in MEMS Dynamic Testing System

Improved temperature error model of silicon MEMS gyroscope with inside frame driving

Effects of Thermal Displacement of MEMS Switch Package Structure on Chip Performance

Study on New Method of MEMS Monolithic Integration and Its Key Technology

Some Issues on Development and Industrialization of MEMS-based Optical Switches

Design and simulation of a new MEMS microactuator