TDDB evaluation experiments are implemented on the thin gate oxides MOS capacitor, and a method of precise measurement and characterization the trap density and accumulative failure are presented.
The process of the evaluation for trap structure is, in essence, a multielement analysis, a mullidecision as well as a fuzzy processing.
圈闭构造的评价过程实质是多元分析与多元决策加上模糊处理的问题。
3
In the paper, the basic concepts oftrapevaluation and fuzzy mathematics are introduced and the mechanism of applying fuzzy mathematics to trapevaluation is expounded in detail.