The citrate method was adopted to prepare LiNbO3 ferroelectricfilm.
采用柠檬酸盐法制备铌酸锂铁电薄膜。
2
The invention is capable of improving level difference coverage property of ferroelectricfilm.
根据本发明可以提高强电介质膜的段差覆盖性。
3
A ferroelectric capacitor is formed above a substrate and made of a lamination of a lower electrode, a capacitor ferroelectricfilm and an upper electrode stacked in this order.