An epitaxial deposition process including a dry etchprocess, followed by an epitaxial deposition process is disclosed.
本发明提供一外延沉积工艺,其包含干式蚀刻工艺与后续的外延沉积工艺。
2
The most competitive technologies of transferring solid membrane mainly include bond and etchprocess and smart cut process.
最具竞争力的转移固体薄膜技术主要有键合加选择性腐蚀工艺和注氢智能剥离工艺。
3
Improvement of Dry ETCHprocess as the main means, and the improvement of the whole Aluminum ETCH flow as accessorial means. We want to get effective solution of Aluminum corrosion defect.