Therefore, such factors having effect on the precision of deepUV lithography as diffraction effect, exposure dosage, wavelength and distribution of fly's eyes lens etc.
From the pl spectrum, the UV emission peak of the sample annealed in vacuum increase clearly and deep-level emi.
从光致发光光谱中发现，真空退火后的样品的紫外光谱峰显著增强，而深能级发射峰几乎消失。
3
The photo-oxidation reaction of poly (styrene-sulfone)-a novel positive deepUV photoresist including film and solution has been studied by fluorescence spectra.