The relief structure of diffraction optical element can be written precisely but very slowly with the raster scan mode bye-beam.
用电子束逐行扫描方法刻蚀衍射光学元件的浮雕结构精度高而速度低。
2
Its structure was characterized by X-ray powder diffraction, elemental analysis, high performance liquid chromatography, and differential scan calorimetry.