Essay brief a few kind methods of correctingdistortion of Scan Projection Mask Alignment System.
介绍了调整扫描投影式光刻机畸变的几种方法。
2
The experiment shows that these distortion parameters gained with the proposed method are good at a correctingdistortion image.
实验表明，用该方法得到的畸变参数，能够很好地校正图像。
3
Controlling for the variables related, preventing the crriage from cracking during welding and correctingdistortion for it after welding are discussed, too.