Directcurrent hot cathode plasma glow discharge chemical vapor deposition (DC-HCPCVD) is a new method to deposit high quality diamond films with high growth rate.
直流热阴极辉光放电等离子体化学气相沉积法是我们建立的快速沉积高品质金刚石膜的新方法。
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This article covers the mechanism, advantages of plasma modification, as well as generating methods of direct and alternative current glow discharge.
文中论述了等离子体表面改性的作用机理、优点，介绍了产生大气压直流辉光放电和交流辉光放电的方法。
3
The mechanism on directcurrent arc discharge has been reviewed in this paper.