By laser trimming the differentialcapacitance amplifier, the offset current of circuit is reduced to under 1.
通过对内部的差动电容检测器进行激光修调，使该伺服电路的零偏电流小于1。
2
The working principle of the new type charge balance differentialcapacitance micrometer, the design of hardware configuration and the achievable method of software were described.
阐述了新型电平衡式差动电容测微仪的工作原理、硬件结构设计及其软件实现方法。
3
A micro differentialcapacitance and a micro harmonic oscillator are studied and designed. The structure of the micro differentialcapacitance is optimized by use of the ANSYS software.