Considering the ratio of short in the corner of the channel, the small slit & bar design is suitable for four mask processing, and the cornerdefect can be avoided by tuning bar size.
When you return to your test results, you should see the defect related to the results in the upper-right corner (Figure 33).
当您返回至您的测试结果时,您应该看到右上角与结果相关的缺陷(图33)。
3
This paper introduces the theory calculation of shear wave reflection for block corner. And it derives the echo acoustic pressure theory calculation formula for block corner and its shape defect.