The lithography technique to fabricate the curved microlens array on the curvedsubstrate by using laser direct writing system was also given.
文中给出了用激光直写设备在曲面基底上进行光刻来制作曲面微透镜阵列的方法。
2
The eddy-current coils and the substrate material have better flexibility so as to measure the clearance among curved faces of any form, and can be arranged in the narrow space for measurement.