Soft X-ray zone plate is an important element which has the function of concentration, dispersion and imaging in soft X-ray optics.
软x射线波带片是软x射线光学中聚焦、色散和成像的重要元件。
2
To solve the problem that the single structure stiffness matrix caused by the too big dispersion of element thickness between different levels, it proposed the adjustive method of relevant parameters.
为解决各层优化单元厚度相差太大，易造成结构刚度矩阵奇异的问题，提出对相应参数的调整方法。
3
The dispersion and loss characteristics of groove guide with arbitrary shapes are analyzed with high-order finite element method.