The substrate transfer apparatus transfers a substrate (S) between a corechamber and the peripheral chambers.
所述基板传送装置在中心室和周边室之间传送基板（S）。
2
Die stress analysis results show that the deformation of the die core increases with welding chamber height. For the stress distribution, there exists a best welding chamber height.
The disk type module is the core of the water softening plant and is characterized in that the water softening chamber is filled with single strong acid cation exchange resin.