A copperline having self assembled monolayer for use in ULSI semiconductor devices and methods of making the same are presented.
本发明提供用于ULSI半导体器件的具有自组装单分子层的铜线及其制造方法。
2
The copperline includes an interlayer dielectric, a self-assembled monolayer, catalytic particles on the monolayer, and a copper layer on the monolayer with the catalytic particles.
层间电介质、自组装单分子层、在该单分子层上的催化颗粒、以及在具有催化颗粒的单分子层上的铜层。
3
The same problem also affects fixed-line telecoms networks, as broadband infrastructure is upgraded from copper wires to optical fibres and new equipment is installed to handle larger volumes of data.