The paper is of important instructive importance to reduce loss and depletion by sublevel caving method without sill pillar.
并对今后无底柱分段崩落法降低损失贫化具有重要的指导意义。
2
By utilizing the method, the doping concentration of the epitaxial layer is regulated to increase the widening of the depletion region so as to further improve the photon absorption efficiency.
利用本发明的方法，通过外延层的掺杂浓度来调节以增加耗尽区的展宽，可进一步提高光子吸收效率。
3
As the method does not make depletion approximation nor ignores the influence of inversion layer charge on electric potential, it is thus exact.