The effects of the condensing layer of the cryopanel on the cryopump capabilities were analyzed.
分析了液氦低温板的凝结层对低温泵性能的影响。
2
To decrease the radiation heat load of the cryopanel is considered to be necessary for the design of cryopumps.
减小低温板的辐射热负荷是低温泵设计中的关键问题。
3
By simulating the temperature of the cryopanel and the relation between the pressure and pumping gas speed of the cryopump, it was verified the vacuum system design was rational.