Furthermore, we study the effects of various rf frequency on the voltage at the electrode, the sheath width, the IED and IAD impinging on the rf-biasedelectrode.
进一步，研究了射频频率对极板电位、鞘层宽度、极板上入射离子的能量分布和角度分布的影响。
2
The equivalent circuit model gives the instantaneous relationship between the sheath thickness and the surface potential at an insulating substrate placed on the pulse-biasedelectrode.