This paper describes the datacharacter of semiconductor dopants and the quality control method.
本文讨论半导体掺杂薄层的数据特性和质量管理方法。
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First of all, because it extracts datacharacter of input spectrum by using PLS, so the dimensions of input variable of SVM modeling are decreased effectively.
The result shows the three methods can be used in deformation series-datacharacter analysis, and to determine variability, chaos and fractal dimension character.