Assembly method for the Optic is designed and the solution for problem about positioning and aligning of the contactcoupling and trapped friction which affect the figure are put forward.
Micro cantilever probe of atomic force microscope (AFM) is a typical micro mechanical component, which is under a coupling deformation during the contact scanning process.
原子力显微镜（AFM）的微探针系统是典型的微机械构件，它在接触扫描过程处于耦合变形状态。
3
A non contact temperature transducer based on light coupling is introduced in this paper.