This thesis adopted single scanning algorithm which is of constant. Because the measurement time is transient, this kind of method is very suitable for high speed measurement on line.
The results show that a certain extent, the other parameters constant, increasing power, increasing scanning speed, small grains become more dense;
结果表明:在一定范围内,其它工艺参数不变,增加功率,增大扫描速度,晶粒更趋致密细小;
3
With the method of dynamic focus, the focus point can be located in the coherence gate during the whole depth scanning. So, the lateral resolution keeps constant.