The main devices of the method include a grating interferometer, which controls the rulingengine motion, and a phase scanning mechanism.
该方法的主要装置包括一个用于控制刻划机运动的光栅干涉仪和一个相位扫描机构。
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Ruling with gratingrulingengine is still the most important means for the fabrication of master grating. Hence, it is valuable to track the state-of-the-art of the diffraction gratingrulingengine.