The induced mechanism, physical model, modal distribution and the test approach on the high-order resonance are studied.
对高次谐振的产生机理、物理模型、模态分布和测试方法等进行了研究。
2
The distribution of radicals in CHF3/C6H6 electron cyclotron resonance (ECR) plasma was investigated by an actinometric optical emission spectroscopy (AOES).