The thermal conductivitysensor integrating MEMS and semi-conductor technique can effectively enhance the measuring precision and reliability of the instrument.
本实用新型采用运用MEMS 技术和半导体工艺集成而成的热导传感器,有效提高了测量精度和可靠性;
2
The experimental set -up and working principle of electromagnetic electrical conductivitysensor are briefly described. The experiment result and application are also presented.
简要地介绍了电磁式电导率传感器的实验装置和工作原理,同时也讨论了实验结果和应用。
3
In order to overcome the disadvantages of traditional method of gas concentration detection, a new method is proposed which keeps thermal conductivitysensor at a constant temperature.