This paper's aim is to combine computer technology for information management with IC fabrication and to study the design method of computer-aided management system of IC fabrication.
Computer applications including scientific computing, data processing and information management, automatic control, computer-aided design manufacturing and testing, the system simulation.
计算机应用领域包括科学计算、数据处理和信息管理、自动控制、辅助设计制造和测试、系统仿真。
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On the basis of this model a kind of computer-aided dynamic informationsystem for equipment trouble management is structurally designed.