With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
2
The electrostatic susceptibility of digital relay was experimentally studied through discharging to the shell by the electrostatic discharge (ESD) generator.