In order to reduce the thermal conductivity and heating capacity and increase the detectivity of array, the suspended structure was formed on silicon wafer by chemical etching of KOH.
When the probability of the photoelectrons produced by the detector is of Poisson or Gaussian distribution, the detectivity and false alarm probability of the signal are calculated respectively.
在探测器产生光电子的概率为泊松分布和高斯分布的情况下，分别对信号的探测率和虚警率进行了定量的计算。
3
The system can be used to measure the voltage responsivity and detectivity of infrared detector at different modulation frequency with rapid speed and high accuracy, it meets the need of measurement.