Some technical problems concerned with computer control system, stage driving system, beam deflection system are here discussed to point out their development trends.
These formulae can be used as an analytic solution for quickly estimating the geometric aberrations of a known deflection system and checking the related computer program.
这些公式不但可用来快速估算偏转象差，还可用来作为校验数字计算程序的理论模型。
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In this paper, computer aided design of the multi-magnetic-pole deflection system, including three stages with 20 pole pieces, was developed. Our results showed that the deflection...