Comparing with the conventional cold glow discharge, the hot cathode glow discharge is a new type of gas discharge.
相对于常规冷阴极辉光放电而言，热阴极辉光放电是一种新型放电形式。
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The plasma can be 4 generated by hot-cathodedischarge or RF discharge of gas. In addition, the device has four metal plasma sources, two magnetron sputtering targets, cold and hot target supports.